Introduction, microfabrication and micromachining fundamentals, scaling effects, mechanics and transduction at microscale, actuation and sensing methods - Electrostatic, piezoelectric, thermal, electromagnetic, resonant, tunneling and microfluidic techniques. Capacitative sensors, resonators, lab on chip devices, microfluidic devices, micromirrors, assembly techniques for MEMS, microsystem packaging.
Introduction, microfabrication and micromachining fundamentals, scaling effects, mechanics and transduction at microscale, actuation and sensing methods - Electrostatic, piezoelectric, thermal, electromagnetic, resonant, tunneling and microfluidic techniques. Capacitative sensors, resonators, lab on chip devices, microfluidic devices, micromirrors, assembly techniques for MEMS, microsystem packaging.
