Lectures provide the theory of integrated circuit fabrication. Students fabricate diodes, transistors and test structures in the laboratory. Topics: clean room practice, thermal oxidation and diffusion, photolithography, thin film deposition, etching, ion implantation, packaging, CMOS and bipolar processes. Prerequisite: ENSC 225 or MSE 251 or PHYS 365 or SEE 231, with a minimum grade of C- and permission of the instructor and a minimum of 80 units. Enrollment in this course is by application only. Students with credit for ENSC 851 may not take this course for further credit.
Lectures provide the theory of integrated circuit fabrication. Students fabricate diodes, transistors and test structures in the laboratory. Topics: clean room practice, thermal oxidation and diffusion, photolithography, thin film deposition, etching, ion implantation, packaging, CMOS and bipolar processes. Prerequisite: ENSC 225 or MSE 251 or PHYS 365 or SEE 231, with a minimum grade of C- and permission of the instructor and a minimum of 80 units. Enrollment in this course is by application only. Students with credit for ENSC 851 may not take this course for further credit.
