The mechanisms, design, fabrication, and testing of microsensors, actuators, and microelectromechanical systems (MEMS). [3-0-0] This course is not eligible for Credit/D/Fail grading.
The mechanisms, design, fabrication, and testing of microsensors, actuators, and microelectromechanical systems (MEMS). [3-0-0] This course is not eligible for Credit/D/Fail grading.