Fundamentals of MEMS (MicroElectroMechanical Systems). Microfabrication of MEMS with solid-state technology. LIGA and micro injection molding. Physics of MEMS. Operational principles of various MEMS devices. [3-1-0] Prerequisite: One of MECH 224, ELEC 204 and all of MECH 360, MECH 368. This course is not eligible for Credit/D/Fail grading.
Fundamentals of MEMS (MicroElectroMechanical Systems). Microfabrication of MEMS with solid-state technology. LIGA and micro injection molding. Physics of MEMS. Operational principles of various MEMS devices. [3-1-0] Prerequisite: One of MECH 224, ELEC 204 and all of MECH 360, MECH 368. This course is not eligible for Credit/D/Fail grading.
