ENMF 529

Introduction to Microelectromechanical Systems

ENMF 529

Introduction to Microelectromechanical Systems

Thinking...

Microelectromechanical systems (MEMS) and devices including microsensors and microactuators. Principles of operation, material properties, fabricat...

Description

Microelectromechanical systems (MEMS) and devices including microsensors and microactuators. Principles of operation, material properties, fabricat...

ENMF 529

ENMF 529

Thinking...

Description

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https://calendar.ucalgary.ca/courses/1176911