Introduction to the fabrication of integrated circuits (ICs). Emphasis is on silicon based devices. Topics include water preparation, oxidation, thin film deposition, diffusion and ion implantation, lithography, wet and dry etching and metallization. An introduction to MEMS and micromachining technology is given [4 credits]
Introduction to the fabrication of integrated circuits (ICs). Emphasis is on silicon based devices. Topics include water preparation, oxidation, thin film deposition, diffusion and ion implantation, lithography, wet and dry etching and metallization. An introduction to MEMS and micromachining technology is given [4 credits]
