(3 units). Physical design of microelectromechanical systems (MEMS) and microfabricated sensors and actuators. An overview of thin and thick film processes and micromachining techniques will provide fabrication background. Design of a variety of devices including piezoresistive, piezoelectric, electromagnetic, thermal, optical, and chemical sensors and actuators. This course is equivalent to ELEC 5707 at Carleton University. Course Component: Lecture
(3 units). Physical design of microelectromechanical systems (MEMS) and microfabricated sensors and actuators. An overview of thin and thick film processes and micromachining techniques will provide fabrication background. Design of a variety of devices including piezoresistive, piezoelectric, electromagnetic, thermal, optical, and chemical sensors and actuators. This course is equivalent to ELEC 5707 at Carleton University. Course Component: Lecture
