A multidisciplinary introduction to the processing of micro and nano scale structures that are applied in emerging fields of high resolution patterning such as micro/nano electronics, photonics and fluidics. Fundamental technology issues including materials, instrumentation, fabrication, and inspection are discussed. Lectures are complemented by a mandatory laboratory component performed in a research laboratory. Laboratory access requires successful completion of safety training offered at the beginning of the course. Weekly hours: 3 Lecture hours and 2 Practicum/Lab hoursPrerequisite(s): EE 271 or EP 317 or ME 214.
A multidisciplinary introduction to the processing of micro and nano scale structures that are applied in emerging fields of high resolution patterning such as micro/nano electronics, photonics and fluidics. Fundamental technology issues including materials, instrumentation, fabrication, and inspection are discussed. Lectures are complemented by a mandatory laboratory component performed in a research laboratory. Laboratory access requires successful completion of safety training offered at the beginning of the course. Weekly hours: 3 Lecture hours and 2 Practicum/Lab hoursPrerequisite(s): EE 271 or EP 317 or ME 214.
